3B XHV Gauge
Measurable as low as 10-12Pa (10-14mbar)
♦ Reduction of soft X-ray & ESD by Bent Belt-Beam method.
♦ Full-closed cylindrical cage-grid with an axial-slit.
♦ Low outgassing hot-cathode gauge by using 0.2% BeCu alloy body.
♦ Reduction of soft X-ray & ESD by Bent Belt-Beam method.
♦ Full-closed cylindrical cage-grid with an axial-slit.
♦ Low outgassing hot-cathode gauge by using 0.2% BeCu alloy body.